Plasma enhanced chemical vapour deposition carbon nanotubes/nanofibres - how uniform do they grow?

被引:212
作者
Teo, KBK
Lee, SB
Chhowalla, M
Semet, V
Binh, VT
Groening, O
Castignolles, M
Loiseau, A
Pirio, G
Legagneux, P
Pribat, D
Hasko, DG
Ahmed, H
Amaratunga, GAJ
Milne, WI
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
[2] Univ Cambridge, Cavendish Lab, Microelect Res Ctr, Cambridge CB3 0HE, England
[3] Univ Lyon 1, CNRS, DPM, Lab Emiss Elect, F-69622 Villeurbanne, France
[4] Univ Fribourg, Dept Phys, CH-1700 Fribourg, Switzerland
[5] CNRS, ONERA, Lab Etud Microstruct, LEM, F-92322 Chatillon, France
[6] Thales R&T France, F-91404 Orsay, France
关键词
D O I
10.1088/0957-4484/14/2/321
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The ability to grow carbon nanotubes/nanofibres (CNs) with a high degree of uniformity is desirable in many applications. In this paper, the structural uniformity of CNs produced by plasma enhanced chemical vapour deposition is evaluated for field emission applications. When single isolated CNs were deposited using this technology, the structures exhibited remarkable uniformity in terms of diameter and height (standard deviations were 4.1 and 6.3% respectively of the average diameter and height). The lithographic conditions to achieve a high yield of single CNs are also discussed. Using the height and diameter uniformity statistics, we show that it is indeed possible to accurately predict the average field enhancement factor and the distribution of enhancement factors of the structures, which was confirmed by electrical emission measurements on individual CNs in an array.
引用
收藏
页码:204 / 211
页数:8
相关论文
共 25 条
  • [1] CATALYTIC GROWTH OF CARBON FILAMENTS
    BAKER, RTK
    [J]. CARBON, 1989, 27 (03) : 315 - 323
  • [2] Field emission from isolated individual vertically aligned carbon nanocones
    Baylor, LR
    Merkulov, VI
    Ellis, ED
    Guillorn, MA
    Lowndes, DH
    Melechko, AV
    Simpson, ML
    Whealton, JH
    [J]. JOURNAL OF APPLIED PHYSICS, 2002, 91 (07) : 4602 - 4606
  • [3] Field emission from carbon nanotubes:: the first five years
    Bonard, JM
    Kind, H
    Stöckli, T
    Nilsson, LA
    [J]. SOLID-STATE ELECTRONICS, 2001, 45 (06) : 893 - 914
  • [4] Bonard JM, 2001, ADV MATER, V13, P184, DOI 10.1002/1521-4095(200102)13:3<184::AID-ADMA184>3.0.CO
  • [5] 2-I
  • [6] BONARD JM, 2002, IN PRESS PHYS REV LE
  • [7] Plasma-induced alignment of carbon nanotubes
    Bower, C
    Zhu, W
    Jin, SH
    Zhou, O
    [J]. APPLIED PHYSICS LETTERS, 2000, 77 (06) : 830 - 832
  • [8] Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition
    Chhowalla, M
    Teo, KBK
    Ducati, C
    Rupesinghe, NL
    Amaratunga, GAJ
    Ferrari, AC
    Roy, D
    Robertson, J
    Milne, WI
    [J]. JOURNAL OF APPLIED PHYSICS, 2001, 90 (10) : 5308 - 5317
  • [9] Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition
    Cui, H
    Zhou, O
    Stoner, BR
    [J]. JOURNAL OF APPLIED PHYSICS, 2000, 88 (10) : 6072 - 6074
  • [10] Growth of multiwall carbon nanotubes in an inductively coupled plasma reactor
    Delzeit, L
    McAninch, I
    Cruden, BA
    Hash, D
    Chen, B
    Han, J
    Meyyappan, M
    [J]. JOURNAL OF APPLIED PHYSICS, 2002, 91 (09) : 6027 - 6033