共 50 条
[2]
Bellamy L.J., 1975, INFRARED SPECTRA COM, VThird
[9]
Briggs D., 1982, INT J ADHESION ADHES, V2, P13, DOI 10.1016/0143-7496(82)90061-6
[10]
RELATION OF POLYMER STRUCTURE TO PLASMA-ETCHING BEHAVIOR - ROLE OF ATOMIC FLUORINE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1987, 5 (04)
:1578-1584