Air-suspended two-dimensional polymer photonic crystal slab waveguides fabricated by nanoimprint lithography

被引：26

作者：

Choi, Choon-Gi ^{[1
]}

Han, Young-Tak

Kim, Jin Tae

Schift, Helmut

机构：

[1] Elect & Telecommun Res Inst, ICCL, Taejon 305700, South Korea

[2] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland

来源：

APPLIED PHYSICS LETTERS | 2007年 / 90卷 / 22期

关键词：

D O I：

10.1063/1.2744482

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Air-suspended membrane-type photonic crystals were fabricated in polystyrene. The two-dimensional photonic crystal slab nanostructures were replicated by a thermal nanoimprint process, and then air-suspended membrane structures were generated by a selective sacrificial layer etch process. The optical transmission showed clear band gap characteristics at 1550 nm wavelength, which is in good agreement with the theoretical calculations. (C) 2007 American Institute of Physics.

引用

页数：3

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