Strain variation with sample thickness in GaN grown by hydride vapor phase epitaxy

被引:37
作者
Reynolds, DC [1 ]
Look, DC
Jogai, B
Hoelscher, JE
Sherriff, RE
Molnar, RJ
机构
[1] Wright State Univ, Semicond Res Ctr, Dayton, OH 45435 USA
[2] USAF, Res Lab, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
[3] MIT, Lincoln Lab, Lexington, MA 02173 USA
关键词
D O I
10.1063/1.373839
中图分类号
O59 [应用物理学];
学科分类号
摘要
High quality GaN crystals can be grown on sapphire by hydride vapor phase epitaxy. The thermal expansion mismatch between sapphire and GaN produces strain in the GaN crystal as it is cooled from the growth temperature to room temperature. The strain is evidenced by shifts in the photoluminescence and reflectance line positions. By analyzing the surface strain as the crystal thickness is increased, the thickness required to obtain zero surface strain can be estimated. This structure might provide a lattice matched and thermally matched substrate for further epitaxial growth of GaN. (C) 2000 American Institute of Physics. [S0021-8979(00)06315-5].
引用
收藏
页码:1460 / 1463
页数:4
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