Vacuum arc ion sources - A brief historical review

被引：49

作者：

Brown, IG ^{[1
]}

Oks, EM

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94710 USA

[2] Russian Acad Sci, Inst High Current Elect, Tomsk 634055, Russia

[3] State Acad Control Syst & Radioelect, Tomsk, Russia

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 1997年 / 25卷 / 06期

关键词：

cathodic arc; ion beams; ion implantation; ion sources; metal ions; vacuum arc;

D O I：

10.1109/27.650897

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

The production of energetic metal ion beams by vacuum are ion sources is a subfield of ion beam science and technology that has experienced rapid growth and a great deal of research activity in the last decade or so, Interest in this kind of ion source derives from the high current of metal ions that can be produced-these are the defining and keg properties of the source, and they open up areas of application that have not previously been readily accessible, Here we present a concise history of this field of activity. The background, history, and recent research and development are discussed.

引用

页码：1222 / 1228

页数：7

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