Surface micromachining of polycrystalline SiC deposited on SiO2 by APCVD

被引：11

作者：

Fleischman, AJ ^{[1
]}

Wei, X ^{[1
]}

Zorman, CA ^{[1
]}

Mehregany, M ^{[1
]}

机构：

[1] Case Western Reserve Univ, Dept Elect Engn & Appl Phys, Microfabricat Lab, Cleveland, OH 44106 USA

来源：

SILICON CARBIDE, III-NITRIDES AND RELATED MATERIALS, PTS 1 AND 2 | 1998年 / 264-2卷

关键词：

MEMS; surface micromachining; silicon carbide-on-oxide; APCVD;

D O I：

10.4028/www.scientific.net/MSF.264-268.885

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Polycrystalline SiC (poly-SiC) films were successfully deposited on thermally grown SiO2 on 4-inch Si wafers at 1160 degrees C and 1050 degrees C. The films were characterized using XRD, TEM and RES. The poly-SiC films have a sharp, void free interface with the SiO2 underlayer and the microstructure consists of randomly oriented polycrystalline grains. Films grown at 1050 degrees C show evidence of some excess silicon. Lateral resonant structures fabricated from films grown at 1050 degrees C were found to resonate at actuation voltages as low as 50 V-pp. The Young's modulus for the 1050 degrees C films was determined to be 426 +/- 100 GPa.

引用

页码：885 / 888

页数：4

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