A Flexible Proximity Sensor Fully Fabricated by Inkjet Printing

被引：63

作者：

Wang, Chin-Tsan ^{[1
]}

Huang, Kuo-Yi ^{[2
]}

Lin, David T. W. ^{[3
]}

Liao, Wei-Chia ^{[1
]}

Lin, Hua-Wei ^{[1
]}

Hu, Yuh-Chung ^{[1
]}

机构：

[1] Natl ILan Univ, Dept Mech & Electromech Engn, Ilan 206, Taiwan

[2] Huafan Univ, Dept Mechatron Engn, Taipei 233, Taiwan

[3] Natl Univ Tainan, Grad Inst Mechatron Syst Engn, Tainan 70005, Taiwan

来源：

SENSORS | 2010年 / 10卷 / 05期

关键词：

flexible electronics; inkjet printing; proximity sensor; pyroelectric;

D O I：

10.3390/s100505054

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A flexible proximity sensor fully fabricated by inkjet printing is proposed in this paper. The flexible proximity sensor is composed of a ZnO layer sandwiched in between a flexible aluminum sheet and a web-shaped top electrode layer. The flexible aluminum sheet serves as the bottom electrode. The material of the top electrode layer is nano silver. Both the ZnO and top electrode layers are deposited by inkjet printing. The fully inkjet printing process possesses the advantages of direct patterning and low-cost. It does not require photolithography and etching processes since the pattern is directly printed on the flexible aluminum sheet. The prototype demonstrates that the presented flexible sensor is sensitive to the human body. It may be applied to proximity sensing or thermal eradiation sensing.

引用

页码：5054 / 5062

页数：9

共 9 条

[1] Preparation and characterization of transparent ZnO thin films obtained by spray pyrolysis [J].