共 25 条
[6]
HIRANAGA Y, 2003, P MAT RES SOC S, V748
[7]
Estimation of resolution and contact force of a longitudinally vibrating touch probe sensor using lead zirconate titanate (PZT) thin-film vibrator
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
2001, 40 (5B)
:3646-3651