Performance and application of a high energy monochromated CuKα1 X-ray source for the electron spectroscopy of materials

被引:15
作者
Beamson, G [1 ]
Haines, SR
Moslemzadeh, N
Tsakiropoulos, P
Watts, JF
Weightman, P
Williams, K
机构
[1] NCESS, CCLRC, Daresbury Lab, Warrington WA4 4AD, Cheshire, England
[2] Univ Liverpool, Dept Phys, Liverpool L69 7ZE, Merseyside, England
[3] Univ Surrey, Surface Anal Lab, Sch Engn, Guildford GU2 7XH, Surrey, England
基金
英国工程与自然科学研究理事会;
关键词
high energy XPS; metallic alloys; CuK alpha(1) photons; Auger parameter;
D O I
10.1016/j.elspec.2004.10.008
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
A Cu Kalpha(1) sealed tube X-ray source (hv=8047.8eV) and LiF(220) Johansson geometry monochromator crystal have been interfaced to a Scienta ESCA300 spectrometer for high energy XPS studies of materials, in particular for the measurement of Auger parameters associated with deep core levels in metallic alloys. The detailed arrangement of the source, monochromator and spectrometer combination is described, and factors affecting the overall intensity and resolution are discussed. The optimisation and characterisation of the system are also described. Several examples of Cu Kalpha(1) excited survey spectra (Cr, Fe, stainless steel), deep core level spectra (Cr 1s, Fe 1s) and Auger spectra (Cr KLL, Cr LMM, Fe KLL) are presented, which illustrate the capability of the system. Auger vacancy satellites are identified in the Cr LMM spectrum. For a series of Cr-Si alloys measurements are reported of the change in the Cr Auger parameter on going from metal to alloy. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:151 / 162
页数:12
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