An integrated pressure-driven microsystem based on porous silicon for optical monitoring of gaseous and liquid substances

被引：9

作者：

De Stefano, L.

Alfieri, D.

Rea, I.

Rotiroti, L.

Malecki, K.

Moretti, L.

Della Corte, F. G.

Rendina, I.

机构：

[1] CNR, Inst Microelect & Microsyst, I-80131 Naples, Italy

[2] Univ Reggio Calabria, DIMET Mediterranea, I-89060 Reggio Di Calabria, Italy

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2007年 / 204卷 / 05期

关键词：

D O I：

10.1002/pssa.200674385

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this communication, the design and the fabrication of a silicon-glass microsystem for lab-on-chip sensing applications have been reported. Each component has been realised using wet etch process and the porous silicon (PSi) technology, while the final device has been obtained intimately joining all elements by the Anodic Bonding (AB) process. The flow injection analysis (FIA) principle has been adopted in the microfluidic manipulation of the analyte samples: very small volume of the substances can be quickly and repeatedly monitored. The transducer element of the sensor device is a PSi Fabry-Perot monolayer which allows a very effective interaction with several chemicals and biological molecules. Time resolved measurements revealed very rapid response times in detecting some volatile substances. (c) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

引用

页码：1459 / 1463

页数：5

共 9 条

[1] Integrated silicon-glass opto-chemical sensors for lab-on-chip applications [J].