Integrated silicon-glass opto-chemical sensors for lab-on-chip applications

被引：19

作者：

De Stefano, L

Malecki, K

Rossi, AM

Rotiroti, L

Della Corte, FG

Moretti, L

Rendina, I

机构：

[1] Univ Naples Federico II, Italian Natl Council Res, Inst Microelect & Microsyst, I-80131 Naples, Italy

[2] Mediterranea Univ Reggio Calabria, I-89060 Reggio Di Calabria, Italy

[3] Galileo Ferraris Electrotech Natl Inst, I-10010 Turin, Italy

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2006年 / 114卷 / 02期

关键词：

porous silicon; anodic bonding; microchamber; lab-on-chip;

D O I：

10.1016/j.snb.2005.05.027

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The compatibility of porous silicon and anodic bonding technologies for the realization of sensing micro-components in lab-on-chip applications is demonstrated. In particular, we have developed and tested an innovative anodic bonding process: voltage, time and temperature. have been properly matched in order not to affect the properties of the transducing material, which can be strongly modified by thermal treatments through oxidation. Two devices for chemical and biological sensing have been designed, fabricated and tested. The results obtained are very promising, especially regarding further integration of porous silicon and glass with optical and microelectromechanical instruments. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：625 / 630

页数：6

共 15 条

[1] Progress towards achieving integrated circuit functionality using porous silicon optoelectronic components [J].