Progress towards achieving integrated circuit functionality using porous silicon optoelectronic components

被引：22

作者：

Benson, TM

Arrand, HF

Sewell, P

Niemeyer, D

Loni, A

Bozeat, RJ

Krüger, M

Arens-Fischer, R

Thönissen, M

Lüth, H

机构：

[1] Univ Nottingham, Nottingham NG7 2RD, England

[2] Def & Evaluat Res Agcy, Malvern, Worcs, England

[3] ISI Forschungszentrum Julich, Julich, Germany

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2000年 / 69卷

基金：

英国工程与自然科学研究理事会;

关键词：

porous silicon; optical waveguides; multi-layer reflectors; sensors; optical losses;

D O I：

10.1016/S0921-5107(99)00274-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Porous silicon offers many potential advantages for the realisation of optoelectronic circuits and systems. This paper assesses some of the technologies available for the fabrication of porous silicon waveguides for visible and infrared applications. The unique physical and chemical properties of the material enable additional functionality over other silicon-based optoelectronic technologies. As an example, optical sensing of solvents and vapours is discussed using both optical waveguides and multi-layer reflector stacks. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：92 / 99

页数：8

共 31 条

[1] The application of porous silicon to optical waveguiding technology [J].