Air plasma jet with hollow electrodes at atmospheric pressure

被引：68

作者：

Hong, Yong Cheol ^{[1
]}

Uhm, Han Sup ^{[1
]}

机构：

[1] Ajou Univ, Dept Mol Sci & Technol, Suwon 443749, South Korea

来源：

PHYSICS OF PLASMAS | 2007年 / 14卷 / 05期

关键词：

D O I：

10.1063/1.2736945

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Atmospheric-pressure plasma jet with air is produced through hollow electrodes and dielectric with a hole of 1 mm diam. The plasma jet device is operated by injecting pressurized air into the electrode hole. The air plasma jet device at average powers less than 5 W exhibits a cold plasma jet of about 2 cm in length and near the room temperature, being low enough to treat thermally sensitive materials. Preliminary studies on the discharge characteristics and application tests are also presented by comparing the air plasma jet with the nitrogen and argon plasma jet. (C) 2007 American Institute of Physics.

引用

页数：5

共 20 条

[1] Abatement of PFCs from semiconductor manufacturing processes by nonthermal plasma technologies: A critical review [J].

Chang, Moo Been ;

Chang, Jen-Shih .

INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH, 2006, 45 (12) :4101-4109

[2] Low-temperature direct current glow discharges at atmospheric pressure [J].

Duan, YX ;

Huang, C ;

Yu, QS .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 2005, 33 (02) :328-329

[3] Microplasma jet at atmospheric pressure [J].

Hong, Yong Cheol ;

Uhm, Han Sup .

APPLIED PHYSICS LETTERS, 2006, 89 (22)

[4] Characteristics of dielectric barrier glow discharges with a low-frequency generator in nitrogen [J].

Kim, YH ;

Cha, MS ;

Shin, WH ;

Song, YH .

JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2003, 43 (05) :732-737

[5] Optical emission spectroscopy characterization of oxygen plasma during treatment of a PET foil [J].

Krstulovic, N. ;

Labazan, I. ;

Milosevic, S. ;

Cvelbar, U. ;

Vesel, A. ;

Mozetic, M. .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2006, 39 (17) :3799-3804

[6] Investigation of an atmospheric pressure radio-frequency capacitive plasma jet [J].

Laimer, J ;

Haslinger, S ;

Meissl, W ;

Hell, J ;

Störi, H .

VACUUM, 2005, 79 (3-4) :209-214

[7] Nonthermal decontamination of biological media by atmospheric-pressure plasmas: Review, analysis, and prospects [J].

Laroussi, M .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 2002, 30 (04) :1409-1415

[8] Direct current glow discharges in atmospheric air [J].

Mohamed, AAH ;

Block, R ;

Schoenbach, KH .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 2002, 30 (01) :182-183

[9] Control of radio-frequency atmospheric pressure argon plasma characteristics by helium gas mixing [J].

Moon, SY ;

Han, JW ;

Choe, W .

PHYSICS OF PLASMAS, 2006, 13 (01) :1-4

[10] Discharge phenomena of an atmospheric pressure radio-frequency capacitive plasma source [J].

Park, J ;

Henins, I ;

Herrmann, HW ;

Selwyn, GS ;

Hicks, RF .

JOURNAL OF APPLIED PHYSICS, 2001, 89 (01) :20-28

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