Structural investigation of Pt-Al2O3 co-sputtered nano-cermet films studied by small angle X-ray scattering, grazing angle X-ray reflectometry, TEM and AFM

被引：18

作者：

Sella, C ^{[1
]}

Maaza, M

Pardo, B

Dunsteter, F

Martin, JC

Sainte Catherine, MC

Kaba, A

机构：

[1] CNRS, Lab Opt Solide, F-91195 Meudon, France

[2] Univ Witwatersrand, Dept Phys, Johannesburg, South Africa

[3] Univ Orsay, Inst Opt Theor & Appl, F-91403 Orsay, France

[4] Ecole Polytech, Solides Irradies Lab, F-91128 Palaiseau, France

[5] Lab Genie Elect Paris, F-91191 Gif Sur Yvette, France

[6] DGA, ETCA, CREA, Etab Tech Cent Armement, Arcueil, France

[7] Univ Dakar, Dept Phys, Dakar, Senegal

来源：

SURFACE & COATINGS TECHNOLOGY | 1997年 / 97卷 / 1-3期

关键词：

atomic force microscopy; cermet films; cosputtering; grazing angle X-ray reflectometry; small angle X-ray scattering; transmission electron microscopy;

D O I：

10.1016/S0257-8972(97)00321-6

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The physical properties of nanocermets are related mostly to their morphology. In this contribution, we present the microstructural and morphological evolution of co-sputtered Pt-Al2O3 granular films with thickness, metal concentration and thermal annealing. These investigations are achieved by grazing angle X-ray reflectometry (GAXR), small angle X-ray scattering (SAXS), transmission electron microscopy and atomic force microscopy. The experimental results show that. (1) the diameter of platinum nanoparticles increases as a function of film thickness, annealing temperature and metal concentration; and (2) a columnar growth is observed whose morphology is depending also on the previous parameters and on the growth direction. (C) 1997 Elsevier Science S.A.

引用

页码：603 / 610

页数：8

共 4 条

[1] AUTOMATIC CHARACTERIZATION OF LAYERS STACKS FROM REFLECTIVITY MEASUREMENTS - APPLICATION TO THE STUDY OF THE VALIDITY-CONDITIONS OF THE GRAZING X-RAYS REFLECTOMETRY [J].