HFCVD diamond film nucleation and growth studies by in-situ optical technique and ex-situ AFM observations

被引：7

作者：

Bonnot, AM ^{[1
]}

Schauer, R ^{[1
]}

Weidner, B ^{[1
]}

机构：

[1] CNRS, Etud Proprietes Elect Solides Lab, F-38042 Grenoble 9, France

来源：

关键词：

HFCVD; in-situ optical studies; diamond film nucleation; AFM;

D O I：

10.1016/S0925-9635(97)00295-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond films were prepared by HFCVD. Characteristic steps of the diamond film formation were in-situ followed by measurements of the spatial distribution of the scattered light intensity and characterised by AFM observations. In particular, the presence of absorbing particles or germs prior to the formation of diamond nuclei has been brought to the fore. (C) 1998 Elsevier Science S.A.

引用

页码：205 / 208

页数：4

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