INVESTIGATION OF THE GROWTH-KINETICS OF LOW-PRESSURE DIAMOND FILMS BY IN-SITU ELASTIC-SCATTERING OF LIGHT AND REFLECTIVITY

被引：33

作者：

BONNOT, AM

MATHIS, BS

MOULIN, S

机构：

[1] Laboratoire d'Etudes des Propriétés Electroniques, Centre National de la Recherche Scientifique, Associé À l'Université J. Fourier, 38042 Grenoble Cedex 09

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 13期

关键词：

D O I：

10.1063/1.110704

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A detailed analysis of in situ optical measurements of elastic scattering of light and reflectivity during diamond film synthesis is presented. From the results we propose a growth kinetic model for the very first stages when isolated tiny particles are formed and until they coalesce to form a continuous diamond film.

引用

页码：1754 / 1756

页数：3

共 7 条

[1] BARBER PW, 1991, LIGHT SCATTERING PAR
[2] RAMAN MICROSPECTROSCOPY OF DIAMOND CRYSTALS AND THIN-FILMS PREPARED BY HOT-FILAMENT-ASSISTED CHEMICAL VAPOR-DEPOSITION
BONNOT, AM
[J]. PHYSICAL REVIEW B, 1990, 41 (09) : 6040 - 6049
[3] INSITU INVESTIGATION OF LOW-PRESSURE DIAMOND GROWTH BY ELASTIC-SCATTERING OF LIGHT AND REFLECTANCE SPECTROSCOPY
BONNOT, AM
LOPEZRIOS, T
MATHIS, BS
LEROY, J
[J]. DIAMOND AND RELATED MATERIALS, 1992, 1 (2-4) : 161 - 163
[4] BORN M, 1991, PRINCIPLES OPTICS
[5] ELASTIC-SCATTERING OF LIGHT AND REFLECTIVITY DEVELOPMENT DURING LOW-PRESSURE DIAMOND FILM GROWTH
MATHIS, BS
BONNOT, AM
[J]. DIAMOND AND RELATED MATERIALS, 1993, 2 (5-7) : 718 - 721
[6] WILD C, 1991, 1991 P APPL DIAM C, P197
[7] CURRENT ISSUES AND PROBLEMS IN THE CHEMICAL VAPOR-DEPOSITION OF DIAMOND
YARBROUGH, WA
MESSIER, R
[J]. SCIENCE, 1990, 247 (4943) : 688 - 696

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