ELASTIC-SCATTERING OF LIGHT AND REFLECTIVITY DEVELOPMENT DURING LOW-PRESSURE DIAMOND FILM GROWTH

Growth mechanisms of diamond films have been investigated by in-situ measurements of clastic scattering of light and reflectivity of 632.8 nm He-Ne laser radiation. Films were prepared by hot-filament chemical vapour deposition with methane and hydrogen. A systematic study of the influence of the synthesis conditions on the optical measurements has been undertaken. Scanning electron microscopy observations at the different stages of the growth have allowed us to relate the in-situ optical responses to the principal steps of the film formation. It will also be shown that the development of scattering of light with increasing deposition time allows us to determine the index of refraction of the film.