Convenient Preparation of High-Quality Specimens for Annealing Experiments in the Transmission Electron Microscope

被引：40

作者：

Duchamp, Martial ^{[1
,1
]}

Xu, Qiang ^{[2
,3
]}

Dunin-Borkowski, Rafal E. ^{[1
]}

机构：

[1] Forschungszentrum Julich, Peter Grunberg Inst, D-52428 Julich, Germany

[2] DENSsolutions, NL-2628 XH Delft, Netherlands

[3] Delft Univ Technol, Kavli Inst Nanosci, NL-2628 CJ Delft, Netherlands

来源：

MICROSCOPY AND MICROANALYSIS | 2014年 / 20卷 / 06期

关键词：

transmission electron microscopy; specimen preparation; focused ion beam milling; in situ annealing;

D O I：

10.1017/S1431927614013476

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A procedure based on focused ion beam milling and in situ lift-out is introduced for the preparation of high-quality specimens for in situ annealing experiments in the transmission electron microscope. The procedure allows an electron-transparent lamella to be cleaned directly on a heating chip using a low ion energy and back-side milling in order to minimize redeposition and damage. The approach is illustrated through the preparation of an Al-Mn-Fe complex metallic alloy specimen.

引用

页码：1638 / 1645

页数：8

共 25 条

[1]

[Anonymous], 2003, High resolution focused ion beams: FIB and its applications: Fib and its applications: the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology, DOI DOI 10.1007/978-1-4615-0765-9

[2] The Al-rich region of the Al-Mn-Ni alloy system. Part I: Ternary phases at 750-950 °C [J].

Balanetskyy, S. ;

Meisterernst, G. ;

Feuerbacher, M. .

JOURNAL OF ALLOYS AND COMPOUNDS, 2011, 509 (09) :3787-3794

[3] Conventional and back-side focused ion beam milling for off-axis electron holography of electrostatic potentials in transistors [J].

Dunin-Borkowski, RE ;

Newcomb, SB ;

Kasama, T ;

McCartney, MR ;

Weyland, M ;

Midgley, PA .

ULTRAMICROSCOPY, 2005, 103 (01) :67-81

[4]

FEI Company xT, 2003, NOV NANOLAB US MAN, P5

[5] Location specific in situ TEM straining specimens made using FIB [J].

Field, RD ;

Papin, PA .

ULTRAMICROSCOPY, 2004, 102 (01) :23-26

[6] Epitaxial CdSe-Au Nanocrystal Heterostructures by Thermal Annealing [J].

Figuerola, Albert ;

van Huis, Marijn ;

Zanella, Marco ;

Genovese, Alessandro ;

Marras, Sergio ;

Falqui, Andrea ;

Zandbergen, Henny W. ;

Cingolani, Roberto ;

Manna, Liberato .

NANO LETTERS, 2010, 10 (08) :3028-3036

[7] Focused ion beam milling and micromanipulation lift-out for site specific cross-section TEM specimen preparation [J].

Giannuzzi, LA ;

Drown, JL ;

Brown, SR ;

Irwin, RB ;

Stevie, FA .

SPECIMEN PREPARATION FOR TRANSMISSION ELECTRON MICROSCOPY OF MATERIALS IV, 1997, 480 :19-27

[8]

Harlow W., 2014, MICROSC MICROANAL S3, V20, P1602, DOI [10. 1017/S143192761400974X, DOI 10.1017/S143192761400974X]

[9] Metadislocations in the complex metallic alloys T-Al-Mn- (Pd, Fe) [J].

Heggen, M. ;

Houben, L. ;

Feuerbacher, M. .

ACTA MATERIALIA, 2011, 59 (11) :4458-4466

[10]

Heggen M, 2010, NAT MATER, V9, P332, DOI [10.1038/nmat2713, 10.1038/NMAT2713]

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