共 48 条
[44]
Excimer ablation lithography (EAL) for TFT-LCD
[J].
EXCIMER LASERS, OPTICS, AND APPLICATIONS,
1997, 2992
:98-107
[45]
URECH L, 2004, SPIE, V5448, P52
[46]
URECH L, 2006, SPIE, V6261, P26114
[47]
URECH L, IN PRESS APPL SURF S, P24911