Inferring ejection distances and a surface energy profile in keV particle bombardment experiments

被引:12
作者
Delcorte, A
Segda, BG
Garrison, BJ
Bertrand, P
机构
[1] Penn State Univ, Dept Chem, University Pk, PA 16802 USA
[2] Univ Catholique Louvain, Unite Physico Chim & Phys Mat, B-1348 Louvain, Belgium
[3] Univ Ouagadougou, Fac Sci & Tech, Dept Phys, Ouagadougou 03, Burkina Faso
基金
美国国家科学基金会;
关键词
secondary ion mass spectrometry; sputtering; ion emission; kinetic energy distribution; ion induced damage; disappearance cross-section; polymer; MD simulation;
D O I
10.1016/S0168-583X(00)00263-9
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The disappearance cross-sections and kinetic energy distributions of fragment ions sputtered from polystyrene thin films under 12 keV Ga-69(+) ion bombardment are measured using a time-of-flight spectrometer. Even though the disappearance cross-sections are often used as an indicator of radial ion beam damage, the derived radii range from 2 to 10 a depending on the particular hydrocarbon fragment. Therefore, the disappearance cross-sections cannot be directly related to a single global quantity of damage per incident particle. Likewise, the widths of the measured kinetic energy depend on the particular hydrocarbon fragment. Both the disappearance cross-sections and the widths of the kinetic energy distribution superficially relate to fragment mass but the correlation is not perfect. We develop a hypothesis that the disappearance cross-section and the width of the kinetic energy distribution actually correlate with the ejection radius of the particular fragment. Thus, the kinetic energy distributions provide an estimate of the radial extent of the energy density in the ejection region. Our interpretations are supported by molecular dynamics simulation results. For comparison with previously reported data, our results indicate that the deposited energy profile is 4-5 times narrower than for 72.3 MeV, electronic sputtering of PVDF [Phys. Rev. Lett. 77 (1996) 667]. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:277 / 290
页数:14
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