Photosensitivity in silica-based waveguides deposited by atmospheric pressure chemical vapor deposition

被引:9
作者
Saito, T [1 ]
Hanada, T [1 ]
Kitamura, N [1 ]
Kitamura, M [1 ]
机构
[1] NEC Corp Ltd, Optoelect Res Labs, Miyamae Ku, Kawasaki, Kanagawa 216, Japan
来源
APPLIED OPTICS | 1998年 / 37卷 / 12期
关键词
D O I
10.1364/AO.37.002242
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
By using a Mach-Zehnder interferometer, we evaluated photosensitivity in silica-based waveguides deposited by atmospheric pressure vapor deposition. Our results show that photosensitivity with ArF excimer laser irradiation was ten times greater than photosensitivity with KrF excimer laser irradiation. ArF excimer laser irradiation induced a refractive-index change of greater than 2 x 10(-3) at 1.55 mu m and a birefringence between TE and TM modes of less than 6 x 10(-5). It has also been determined that the photoinduced absorption change of 90 dB/mm at 210 nm cannot account for a refractive-index change greater than 10(-3). (C) 1998 Optical Society of America.
引用
收藏
页码:2242 / 2244
页数:3
相关论文
共 15 条
[1]   PHOTOSENSITIVITY IN GE-DOPED SILICA OPTICAL WAVE-GUIDES AND FIBERS WITH 193-NM LIGHT FROM AN ARF EXCIMER-LASER [J].
ALBERT, J ;
MALO, B ;
BILODEAU, F ;
JOHNSON, DC ;
HILL, KO ;
HIBINO, Y ;
KAWACHI, M .
OPTICS LETTERS, 1994, 19 (06) :387-389
[2]  
Bazylenko M. V., 1997, Proceedings ECIO '97. 8th European Conference on Integrated Optics and Technical Exhibition, P44
[3]   PHOTOSENSITIZATION OF OPTICAL-FIBER AND SILICA-ON-SILICON SILICA WAVE-GUIDES [J].
BILODEAU, F ;
MALO, B ;
ALBERT, J ;
JOHNSON, DC ;
HILL, KO ;
HIBINO, Y ;
ABE, M ;
KAWACHI, M .
OPTICS LETTERS, 1993, 18 (12) :953-955
[4]  
HANADA T, 1997, IEICE T ELECT, V1, P1
[5]   PHOTOINDUCED REFRACTIVE-INDEX CHANGES IN TIO2-DOPED SILICA OPTICAL WAVE-GUIDES ON SILICON SUBSTRATE [J].
HIBINO, Y ;
ABE, M ;
KOMINATO, T ;
OHMORI, Y .
ELECTRONICS LETTERS, 1991, 27 (24) :2294-2295
[6]  
HIBINO Y, 1990, IEEE PHOTONIC TECH L, V3, P640
[7]   PHOTOSENSITIVITY IN OPTICAL FIBER WAVEGUIDES - APPLICATION TO REFLECTION FILTER FABRICATION [J].
HILL, KO ;
FUJII, Y ;
JOHNSON, DC ;
KAWASAKI, BS .
APPLIED PHYSICS LETTERS, 1978, 32 (10) :647-649
[8]   ALL-FIBER NARROW-BAND REFLECTION GRATINGS AT 1500 NM [J].
KASHYAP, R ;
ARMITAGE, JR ;
WYATT, R ;
DAVEY, ST ;
WILLIAMS, DL .
ELECTRONICS LETTERS, 1990, 26 (11) :730-732
[9]   HIGH-PRESSURE H-2 LOADING AS A TECHNIQUE FOR ACHIEVING ULTRAHIGH UV PHOTOSENSITIVITY AND THERMAL SENSITIVITY IN GEO2 DOPED OPTICAL FIBERS [J].
LEMAIRE, PJ ;
ATKINS, RM ;
MIZRAHI, V ;
REED, WA .
ELECTRONICS LETTERS, 1993, 29 (13) :1191-1193
[10]   ENHANCED PHOTOSENSITIVITY IN LIGHTLY DOPED STANDARD TELECOMMUNICATION FIBER EXPOSED TO HIGH FLUENCE ARF EXCIMER-LASER LIGHT [J].
MALO, B ;
ALBERT, J ;
HILL, KO ;
BILODEAU, F ;
JOHNSON, DC ;
THERIAULT, S .
ELECTRONICS LETTERS, 1995, 31 (11) :879-880