Oxidation of aluminum studied by secondary electron emission

被引：17

作者：

Benka, O ^{[1
]}

Steinbatz, M ^{[1
]}

机构：

[1] Univ Linz, Abt Atom & Oberflaechenphys, Inst Expt Phys, A-4040 Linz, Austria

来源：

SURFACE SCIENCE | 2003年 / 525卷 / 1-3期

基金：

奥地利科学基金会;

关键词：

secondary electron emission; oxidation; aluminum; aluminum oxide; polycrystalline surfaces;

D O I：

10.1016/S0039-6028(02)02561-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The electron emission yield is measured for impact of 3 keV electrons on polycrystalline aluminum, which is exposed to oxygen. At different oxygen gas pressures the yield is measured as a function of time. The oxygen pressure is in the range between 2 x 10(-9) and 3 x 10(-6) mbar. It is found that the yield depends not only on oxygen exposure but also on the oxygen pressure. In the begin of oxygen exposure the yield decreases due to chemisorption of oxygen, but then the yield increases due to oxide formation. A model based on rate equations with adjustable parameters is proposed, which describes the oxidation process and electron emission yield. The parameters are fitted to give best agreement with the measured yield curves. The parameters include sticking coefficients and time constants of oxidation. Whenever possible, evaluated parameters were compared with published data and reasonable agreement is found. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：207 / 214

页数：8

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