Patterning conductive copper by nanotransfer printing

被引:56
作者
Felmet, K
Loo, YL [1 ]
Sun, YM
机构
[1] Univ Texas, Dept Chem Engn, Austin, TX 78712 USA
[2] Univ Texas, Ctr Nano & Mol Sci & Technol, Austin, TX 78712 USA
[3] Univ Texas, Dept Chem & Biochem, Austin, TX 78712 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.1803916
中图分类号
O59 [应用物理学];
学科分类号
摘要
We describe a method for patterning conductive copper over large areas by nanotransfer printing (nTP). This technique is purely. additive and yields feature sizes in the 1-500 mum range. Unlike gold patterns printed in a similar manner, oligomers from poly(dimethylsiloxane) (PDMS) stamps used in nTP permeate through the entire thickness of printed copper resulting in nonconductive patterns. Hot leaching the PDMS stamps in toluene prior to printing removes residual oligomers; printing with pretreated stamps reproducibly yields conductive copper patterns with an average resistivity of 3 muOmega-cm. (C) 2004 American Institute of Physics.
引用
收藏
页码:3316 / 3318
页数:3
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