High tunability in compositionally graded epitaxial barium strontium titanate thin films by pulsed-laser deposition

被引:141
作者
Lu, SG [1 ]
Zhu, XH
Mak, CL
Wong, KH
Chan, HLW
Choy, CL
机构
[1] Hong Kong Polytech Univ, Dept Appl Phys, Kowloon, Hong Kong, Peoples R China
[2] Hong Kong Polytech Univ, Mat Res Ctr, Kowloon, Hong Kong, Peoples R China
关键词
D O I
10.1063/1.1569427
中图分类号
O59 [应用物理学];
学科分类号
摘要
Compositionally graded barium strontium titanate [(BaxSr1-x)TiO3-BST, x=0.75, 0.8, 0.9, and 1.0] thin films are fabricated by pulsed-laser deposition on a LaAlO3 substrate with (La0.7Sr0.3)MnO3 as the bottom electrode. A high dielectric permittivity and temperature characteristic without Curie-Weiss law are obtained. A tunability of over 70% is obtained at frequency of 1 MHz, which is higher than that of single BST layer with the same compositions. All the results indicate that the graded thin films have better electrical properties than a single-layer film. (C) 2003 American Institute of Physics.
引用
收藏
页码:2877 / 2879
页数:3
相关论文
共 16 条
[11]  
LU SG, 1999, FERROELECTRICS, V229, P241
[12]   FABRICATION AND CHARACTERIZATION OF BA1-XSR1-XTIO3 TUNABLE THIN-FILM CAPACITORS [J].
OUTZOURHIT, A ;
TREFNY, JU ;
KITO, T ;
YARAR, B ;
NAZIRIPOUR, A ;
HERMANN, AM .
THIN SOLID FILMS, 1995, 259 (02) :218-224
[13]   Realization of high tunability barium strontium titanate thin films by rf magnetron sputtering [J].
Padmini, P ;
Taylor, TR ;
Lefevre, MJ ;
Nagra, AS ;
York, RA ;
Speck, JS .
APPLIED PHYSICS LETTERS, 1999, 75 (20) :3186-3188
[14]   High-dielectric constant thin films for dynamic random access memories (DRAM) [J].
Scott, JF .
ANNUAL REVIEW OF MATERIALS SCIENCE, 1998, 28 :79-100
[15]  
*SEM IND ASS, 1999, INT TECHN ROADM SEM, P134
[16]   Top-interface-controlled fatigue of epitaxial Pb(Zr0.52Ti0.48)O3 ferroelectric thin films on La0.7Sr0.3MnO3 electrodes [J].
Wu, WB ;
Wong, KH ;
Choy, CL ;
Zhang, YH .
APPLIED PHYSICS LETTERS, 2000, 77 (21) :3441-3443