Zinc blende GaN grown by radio frequency plasma assisted molecular beam epitaxy

被引:12
作者
Cho, HD
Ko, NH
Park, SH
Kang, TW
Han, JW
Eom, KS
Won, SH
Jung, KS
机构
[1] DONGGUK UNIV,DEPT PHYS,CHUNG KU,SEOUL 100715,SOUTH KOREA
[2] SEJONG UNIV,DEPT PHYS,KWANGJIN KU,SEOUL 449701,SOUTH KOREA
[3] UIDUCK UNIV,KYUNGBUK,SOUTH KOREA
[4] KYUNG HEE UNIV,DEPT ELECT ENGN,KYONGGI DO 499701,SOUTH KOREA
关键词
D O I
10.1016/S0022-0248(96)00864-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We investigate the influence of nitridation on the growth of GaN films. We present undoped alpha- and beta-GaN on 3C-SiC coated Si (0 0 1) with and without nitridation, respectively, using radio frequency plasma assisted molecular beam epitaxy. In the case without nitridation, the RHEED (2 x 2) streak pattern at both [1 0 0] and [1 1 0] azimuths shows that the high-quality zinc blende GaN films are grown. The X-ray diffraction (XRD) shows that (0 0 2) zinc blende GaN is observed at 2 theta = 39.53 degrees. At 10 K, PL of the zinc blende GaN is dominated by band edge emission at 3.362 eV. On the other hand, alpha-GaN films are obtained it nitridation that exhibit the (0 0 0 2) wurtzite GaN peak at 34.25 degrees in the XRD measurement.
引用
收藏
页码:125 / 128
页数:4
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