Ceramic microtubes self-formed at room temperature that exhibit a large bending stress

被引:7
作者
Akiyama, M [1 ]
Shobu, K [1 ]
Xu, CN [1 ]
Nonaka, K [1 ]
Watanabe, T [1 ]
机构
[1] Kyushu Natl Ind Res Inst, Dept Inorgan Composite Mat, Saga 8410052, Japan
关键词
D O I
10.1063/1.1290703
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have investigated the aluminum nitride microtubes made of aluminum nitride thin film. Aluminum nitride thin film deposited on aluminum foil forms microtubes of itself at room temperature when the aluminum foil is dissolved in hydrochloric acid solution. The aluminum nitride microtubes exhibit a large bending stress of 1100 +/- 94 megapascals. The bending stress is more than three times larger than the bending strength of aluminum nitride bulk. The diameter of the microtubes is proportional to the film thickness. The bending stress is independent of the film thickness and is fixed. (C) 2000 American Institute of Physics. [S0021-8979(00)01720-5].
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页码:4434 / 4436
页数:3
相关论文
共 15 条
[1]   Statistical approach for optimizing sputtering conditions of highly oriented aluminum nitride thin films [J].
Akiyama, M ;
Xu, CN ;
Nonaka, K ;
Shobu, K ;
Watanabe, T .
THIN SOLID FILMS, 1998, 315 (1-2) :62-65
[2]  
[Anonymous], MAT SCI THIN FILMS
[3]  
CHOPRA KL, 1969, THIN FILM PHENOMENA, P271
[4]   ZNO MICROTUBES [J].
FOX, GR ;
DANAI, PA .
JOURNAL OF MATERIALS RESEARCH, 1994, 9 (11) :2737-2740
[5]  
Hanabusa T., 1993, Journal of the Society of Materials Science, Japan, V42, P627, DOI 10.2472/jsms.42.627
[6]   The first crystalline hexagonal Si3N4 microtubes [J].
Huppertz, H ;
Stock, N ;
Schnick, W .
ADVANCED MATERIALS, 1996, 8 (10) :844-&
[7]   Preparation of ceria thin films and microtubes by vapor-phase deposition using NiO as oxygen source [J].
Inaba, M ;
Mineshige, A ;
Nakanishi, S ;
Nishimura, I ;
Tasaka, A ;
Kikuchi, K ;
Ogumi, Z .
THIN SOLID FILMS, 1998, 323 (1-2) :18-22
[8]   Preparation and characterization of SiC microtubes [J].
Keller, N ;
Pham-Huu, C ;
Ledoux, MJ ;
Estournes, C ;
Ehret, G .
APPLIED CATALYSIS A-GENERAL, 1999, 187 (02) :255-268
[9]  
KURAMOTO N, 1989, AM CERAM SOC BULL, V68, P883
[10]   Laser-assisted formation of metallic oxide microtubes [J].
Nanai, L ;
George, TF .
JOURNAL OF MATERIALS RESEARCH, 1997, 12 (01) :283-284