Synthesis of silicon nitride nanowires directly from the silicon substrates

被引:82
作者
Kim, HY
Park, J
Yang, H
机构
[1] Korea Univ, Dept Chem, Jochiwon 339700, South Korea
[2] Hanyang Univ, Coll Engn Sci, Ansan 425791, South Korea
关键词
D O I
10.1016/S0009-2614(03)00428-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We present a novel method to synthesize high-density silicon nitride nanowires directly from the silicon substrates via a catalytic reaction under ammonia or hydrogen flow at 1200 degreesC. Gallium, gallium nitride, and iron nanoparticles deposited on the silicon substrate were used as catalysts. Gallium nitride can act as a nitrogen source under hydrogen flow. The average diameter of the nanowires is 40 nm and their length is about 300 mum. The silicon nitride nanowires consist of a defect-free single-crystalline alpha-phase crystal grown with various growth directions. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:269 / 274
页数:6
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