Photochemistry of thin amorphous films of Fe(CO)4PPh3 on Si(111) surfaces

被引:4
作者
Blair, SL [1 ]
Hill, RH [1 ]
机构
[1] Simon Fraser Univ, Dept Chem, Burnaby, BC V5A 1S6, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
photochemistry; surface chemistry; thin films;
D O I
10.1016/S0022-328X(97)00599-8
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
The photochemical reactions of Fe(CO)(4)PPh3 and Fe(CO)(3)(PPh3)(2) as amorphous films on silicon surfaces are presented. The mechanism of the reaction of Fe(CO)(4)PPh3 in the films has been studied in some detail. Initial CO loss leads to a thermally unstable intermediate, Fe(CO)(3)PPh3, which decomposes in the film leading to the production of iron. In thick films photoproduced CO remains trapped in the film and may react with Fe(CO)(3)PPh3, regenerating the starting material. Further evidence for this intermediate arises from experiments conducted with PPh3 added to the film. In these films the initial photoproduct is trapped by PPh3 yielding Fe(CO)(3)(PPh3)(2). A quantitative study of the quantum yield efficiency in these films was undertaken. The Fe(CO)(3)(PPh3)(2) films are photosensitive undergoing CO loss to yield Fe(CO)(2)(PPh3)(2), as demonstrated by its trapping, by PPh3, to form Fe(CO)(2)(PPh3)(3). Extended photolysis of Fe(CO)(3)(PPh3)(2) films, including those containing photoproduced Fe(CO)(2)(PPh3)(3), results in the formation of iron. The surface photochemistry of both Fe(CO)(4)PPh3, and Fe(CO)(3)(PPh3)(2) are shown to be compatible with standard lithography. Patterns of 1 x 100 mu m lines of iron oxide were easily produced on a silicon surface. (C) 1998 Elsevier Science S.A.
引用
收藏
页码:63 / 73
页数:11
相关论文
共 34 条
[1]  
ACHTON HC, 1983, INORG CHIM ACTA, V71, P163
[2]  
ALMOND MJ, 1988, CHEM BRIT, V24, P1130
[3]   SOLID-STATE PHOTOCHEMISTRY AND STRUCTURE OF TRANS-(ET3P)2NI(N3)2 - PHOTODEPOSITION OF NICKEL [J].
BECALSKA, A ;
BATCHELOR, RJ ;
EINSTEIN, FWB ;
HILL, RH ;
PALMER, BJ .
INORGANIC CHEMISTRY, 1992, 31 (14) :3118-3123
[4]   SOLID-STATE PHOTOCHEMISTRY OF (C8H12)PT(N3)2 AS THIN-FILMS ON SI(111) SURFACES [J].
BICKLEY, DG ;
HILL, RH ;
HORVATH, CI .
JOURNAL OF PHOTOCHEMISTRY AND PHOTOBIOLOGY A-CHEMISTRY, 1992, 67 (02) :181-186
[5]   SOLID-STATE PHOTOCHEMISTRY OF PLATINUM(II) METHYLAZIDE COMPLEXES AS THIN-FILMS ON SI (111) SURFACES - PHOTOLITHOGRAPHY OF PLATINUM FILMS [J].
BLAIR, SL ;
HUTCHINS, J ;
HILL, RH ;
BICKLEY, DG .
JOURNAL OF MATERIALS SCIENCE, 1994, 29 (08) :2143-2146
[6]   THE PHOTOCHEMICAL PRODUCTION OF NICKEL FILMS FROM THIN-FILMS OF THE INORGANIC NICKEL-COMPLEXES TRANS-NIN4X2 (N2-EQUIVALENT-TO-ET2NC2H4NH2, MEHNC2H4NMEH X-EQUIVALENT-TO-NO2, NO3, NCS) [J].
BLAIR, SL ;
XIA, WJ ;
HILL, RH .
JOURNAL OF PHOTOCHEMISTRY AND PHOTOBIOLOGY A-CHEMISTRY, 1994, 81 (03) :183-191
[7]   SYNTHESIS AND DECOMPOSITION OF FERROUS OXALATO HYDRAZINATE PRECURSORS TO OBTAIN MAGNETIC OXIDES [J].
BORKER, V ;
RANE, KS ;
DALAL, VNK .
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1993, 4 (03) :241-248
[8]   MONO-SUBSTITUTION OF IRON PENTACARBONYL CATALYZED BY POLYNUCLEAR IRON CARBONYL ANIONS [J].
BUTTS, SB ;
SHRIVER, DF .
JOURNAL OF ORGANOMETALLIC CHEMISTRY, 1979, 169 (02) :191-197
[9]   SYNTHESIS OF GROUP V SUBSTITUTED DERIVATIVES OF IRON PENTACARBONYL IN HIGH-YIELD [J].
CONDER, HL ;
DARENSBO.MY .
JOURNAL OF ORGANOMETALLIC CHEMISTRY, 1974, 67 (01) :93-97
[10]   THE STEREOCHEMISTRY OF 5-CO-ORDINATE COMPOUNDS .1. INFRARED SPECTRA OF SOME IRON(O) COMPOUNDS [J].
COTTON, FA ;
PARISH, RV .
JOURNAL OF THE CHEMICAL SOCIETY, 1960, (APR) :1440-1446