Tension-tension fatigue of copper thin films

被引：150

作者：

Read, DT ^{[1
]}

机构：

[1] Natl Inst Stand & Technol, Div Mat Reliabil, Boulder, CO 80303 USA

来源：

INTERNATIONAL JOURNAL OF FATIGUE | 1998年 / 20卷 / 03期

关键词：

closed-loop testing; cyclic; displacement; endurance; force; piezoelectric; S-N curve; servo; strain; stress;

D O I：

10.1016/S0142-1123(97)00080-7

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

Tension-tension, load-controlled fatigue results extending to over 100 000 cycles for electron-beam-evaporated copper are reported. The specimen is fabricated as a single tensile coupon with hundreds of grains across the width but only one or few through the thickness, supported on a silicon frame. These specimens had measured values of Young's modulus lower than literature values for bulk polycrystalline values, but had high values of the yield and ultimate strengths. Closed-loop feedback control of the piezoelectric actuators allowed load-controlled fatigue tests with a cycle duration of 15 s. Stress-endurance results for this set of copper films is reported and compared to previous results. Published by Elsevier Science Ltd.

引用

页码：203 / 209

页数：7

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