Observation of high-aspect-ratio nanostructures using capillary lithography

被引:37
作者
Suh, KY [1 ]
Choi, SJ
Baek, SJ
Kim, TW
Langer, R
机构
[1] Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South Korea
[2] Minuta Tech, Ctr Biotechnol Incubating, Seoul 151742, South Korea
[3] MIT, Dept Chem Engn, Cambridge, MA 02139 USA
[4] MIT, Div Biol Engn, Cambridge, MA 02139 USA
关键词
D O I
10.1002/adma.200401089
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Several intriguing nanostructures, such as mushroom-like nanopillars, vertical nanopillars (see Figure), and nanospheres, are made using capillary lithography and a new, UV-curable mold consisting of polyurethane functionalized with an acrylate group. An aspect ratio as high as five is achieved for nanopillars 90 nm in diameter.
引用
收藏
页码:560 / +
页数:6
相关论文
共 32 条
[21]   Improved pattern transfer in soft lithography using composite stamps [J].
Odom, TW ;
Love, JC ;
Wolfe, DB ;
Paul, KE ;
Whitesides, GM .
LANGMUIR, 2002, 18 (13) :5314-5320
[22]   A visible-near infrared range photonic crystal made up of Si nanopillars [J].
Poborchii, VV ;
Tada, T ;
Kanayama, T .
APPLIED PHYSICS LETTERS, 1999, 75 (21) :3276-3278
[23]   Siloxane polymers for high-resolution, high-accuracy soft lithography [J].
Schmid, H ;
Michel, B .
MACROMOLECULES, 2000, 33 (08) :3042-3049
[24]   Fabrication of elastomeric stamps with polymer-reinforced sidewalls via chemically selective vapor deposition polymerization of poly(p-xylylene) [J].
Suh, KY ;
Langer, R ;
Lahann, J .
APPLIED PHYSICS LETTERS, 2003, 83 (20) :4250-4252
[25]  
Suh KY, 2002, ADV FUNCT MATER, V12, P405, DOI 10.1002/1616-3028(20020618)12:6/7<405::AID-ADFM405>3.0.CO
[26]  
2-1
[27]  
Suh KY, 2001, ADV MATER, V13, P1386, DOI 10.1002/1521-4095(200109)13:18<1386::AID-ADMA1386>3.0.CO
[28]  
2-X
[29]   Laser rapid prototyping of photonic band-gap microstructures [J].
Wanke, MC ;
Lehmann, O ;
Muller, K ;
Wen, QZ ;
Stuke, M .
SCIENCE, 1997, 275 (5304) :1284-1286
[30]   Soft lithography [J].
Xia, YN ;
Whitesides, GM .
ANNUAL REVIEW OF MATERIALS SCIENCE, 1998, 28 :153-184