Electrical resistivity of Cu and Nb thin films

被引：46

作者：

Fenn, M ^{[1
]}

Akuetey, G ^{[1
]}

Donovan, PE ^{[1
]}

机构：

[1] Univ London Birkbeck Coll, Dept Phys, London WC1E 7HX, England

来源：

JOURNAL OF PHYSICS-CONDENSED MATTER | 1998年 / 10卷 / 08期

关键词：

D O I：

10.1088/0953-8984/10/8/007

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The electrical resistivity and temperature coefficient of resistivity (TCR) of Cu and Nb thin films have been measured over a range of layer thicknesses between 5.6 nm and 1106 nm. The structure of the films has been characterized using transmission electron microscopy (TEM) and x-ray diffraction. The experimental results have been compared with the semi-classical theory of thin-film resistivity due to Dimmich. The grain boundary reflectivity, R, has been found to vary with grain size in the Nb films. Dimmich's theoretical expression for the TCR does not match experiment, but by adapting the theoretical treatment a satisfactory fit has been obtained. The semi-classical expression predicts a negative TCR for certain thin-film and multilayer systems without the need to appeal to localization or correlation.

引用

页码：1707 / 1720

页数：14

共 23 条

[1] INTERACTION EFFECTS IN DISORDERED FERMI SYSTEMS IN 2 DIMENSIONS [J].

ALTSHULER, BL ;

ARONOV, AG ;

LEE, PA .

PHYSICAL REVIEW LETTERS, 1980, 44 (19) :1288-1291

[2] ABSENCE OF DIFFUSION IN CERTAIN RANDOM LATTICES [J].

ANDERSON, PW .

PHYSICAL REVIEW, 1958, 109 (05) :1492-1505

[3]

[Anonymous], Powder Diffraction File

[4] INFLUENCE OF GRAIN-BOUNDARY AND SURFACE SCATTERING ON THE ELECTRICAL-RESISTIVITY OF SINGLE-LAYERED THIN COPPER-FILMS [J].

ARTUNC, N ;

OZTURK, ZZ .

JOURNAL OF PHYSICS-CONDENSED MATTER, 1993, 5 (05) :559-566

[5]

ASHCROFT, 1976, SOLID STATE PHYSICS

[6] ELECTRONIC TRANSPORT-PROPERTIES OF METALLIC MULTI-LAYER FILMS [J].

DIMMICH, R .

JOURNAL OF PHYSICS F-METAL PHYSICS, 1985, 15 (12) :2477-2487

[7] STRUCTURAL AND ELECTRONIC-PROPERTIES OF ARTIFICIAL METALLIC SUPERLATTICES [J].

FALCO, CM .

JOURNAL DE PHYSIQUE, 1984, 45 (NC-5) :499-507

[8] TEMPERATURE-DEPENDENCE OF THE RESISTIVITY IN CU/TI SUPERLATTICES [J].

FONTANA, MP ;

PODINI, P ;

JIANG, ZM ;

LIU, W .

PHYSICAL REVIEW B, 1990, 42 (09) :5859-5862

[9] The conductivity of thin metallic films according to the electron theory of metals [J].

Fuchs, K .

PROCEEDINGS OF THE CAMBRIDGE PHILOSOPHICAL SOCIETY, 1938, 34 :100-108

[10] THE BOLTZMANN EQUATION IN THE THEORY OF ELECTRICAL CONDUCTION IN METALS [J].

GREENWOOD, DA .

PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1958, 71 (460) :585-596

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