Electrical resistivity of Cu and Nb thin films

被引：46

作者：

Fenn, M ^{[1
]}

Akuetey, G ^{[1
]}

Donovan, PE ^{[1
]}

机构：

[1] Univ London Birkbeck Coll, Dept Phys, London WC1E 7HX, England

来源：

JOURNAL OF PHYSICS-CONDENSED MATTER | 1998年 / 10卷 / 08期

关键词：

D O I：

10.1088/0953-8984/10/8/007

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The electrical resistivity and temperature coefficient of resistivity (TCR) of Cu and Nb thin films have been measured over a range of layer thicknesses between 5.6 nm and 1106 nm. The structure of the films has been characterized using transmission electron microscopy (TEM) and x-ray diffraction. The experimental results have been compared with the semi-classical theory of thin-film resistivity due to Dimmich. The grain boundary reflectivity, R, has been found to vary with grain size in the Nb films. Dimmich's theoretical expression for the TCR does not match experiment, but by adapting the theoretical treatment a satisfactory fit has been obtained. The semi-classical expression predicts a negative TCR for certain thin-film and multilayer systems without the need to appeal to localization or correlation.

引用

页码：1707 / 1720

页数：14

共 23 条

[11] STRUCTURAL AND ELECTRON-TRANSPORT PROPERTIES OF MO/AL MULTILAYER FILMS [J].

IZUMIYA, T ;

HANAMURE, T ;

SAITO, E ;

KANEKO, T ;

YAMAMOTO, R .

JOURNAL OF PHYSICS-CONDENSED MATTER, 1990, 2 (05) :1179-1195

[12] STRUCTURES AND ELECTRICAL-PROPERTIES OF CU/MO METALLIC MULTILAYERED FILMS [J].

KANEKO, T ;

SASAKI, T ;

SAKUDA, M ;

YAMAMOTO, R ;

NAKAMURA, T ;

YAMAMOTO, H ;

TANAKA, S .

JOURNAL OF PHYSICS F-METAL PHYSICS, 1988, 18 (09) :2053-2060

[13]

Kittel, 1986, Introduction to Solid State Physics, V6th

[14] STATISTICAL-MECHANICAL THEORY OF IRREVERSIBLE PROCESSES .1. GENERAL THEORY AND SIMPLE APPLICATIONS TO MAGNETIC AND CONDUCTION PROBLEMS [J].

KUBO, R .

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1957, 12 (06) :570-586

[15] ELECTRICAL-RESISTIVITY MODEL FOR POLYCRYSTALLINE FILMS - CASE OF ARBITRARY REFLECTION AT EXTERNAL SURFACES [J].

MAYADAS, AF ;

SHATZKES, M .

PHYSICAL REVIEW B, 1970, 1 (04) :1382-&

[16] METAL-INSULATOR TRANSITIONS IN NON-CRYSTALLINE SYSTEMS [J].

MOTT, NF .

ADVANCES IN PHYSICS, 1985, 34 (03) :329-401

[17] THE ELECTRICAL-RESISTIVITY OF GOLD-FILMS [J].

SAMBLES, JR ;

ELSOM, KC ;

JARVIS, DJ .

PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1982, 304 (1486) :365-+

[18] STATISTICAL MODEL FOR SIZE EFFECT IN ELECTRICAL CONDUCTION [J].

SOFFER, SB .

JOURNAL OF APPLIED PHYSICS, 1967, 38 (04) :1710-&

[19] THE MEAN FREE PATH OF ELECTRONS IN METALS [J].

SONDHEIMER, EH .

ADVANCES IN PHYSICS, 1952, 1 (01) :1-42

[20] TEMPERATURE-DEPENDENCE OF THE ELECTRICAL-RESISTIVITY, THERMOPOWER AND MAGNETORESISTANCE OF CO-RE SUPERLATTICES [J].

SOUSA, JB ;

PINTO, RP ;

ALMEIDA, B ;

BRAGA, ME ;

FREITAS, PP ;

MELO, LV ;

TRINDALE, IG .

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1994, 137 (1-2) :73-88

← 1 2 3 →