High-power antiguided laser array fabricated without the need for overgrowth

被引:15
作者
Gray, JM [1 ]
Marsh, JH
Roberts, JH
机构
[1] Univ Glasgow, Dept Elect & Elect Engn, Glasgow G12 8QQ, Lanark, Scotland
[2] Univ Sheffield, Dept Elect & Elect Engn, Sheffield S1 3JD, S Yorkshire, England
关键词
gallium arsenide; intermixing; semiconductor laser arrays; superlattice;
D O I
10.1109/68.661399
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The fabrication of conventional semiconductor antiguided laser array structures involves etching of the array profile followed by an overgrowth step, In this letter, we report the fabrication of an antiguided laser array using zinc diffusion induced intermixing of a superlattice to create the necessary index step, The technique was used to fabricate a five-element, 10-mu m center, antiguided laser array operating at 0.860 mu m, The device operated at 1.2x diffraction limit to 3-W pulsed (total, both facets) and 1.6-W quasi continuous-wave (CW) (100-mu s pulses; total, both facets).
引用
收藏
页码:328 / 330
页数:3
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