Preparation and microstructure properties of tetrahedral amorphous carbon films by pulsed laser deposition using camphoric carbon target

被引：24

作者：

Rusop, M ^{[1
]}

Kinugawa, T ^{[1
]}

Soga, T ^{[1
]}

Jimbo, T ^{[1
]}

机构：

[1] Nagoya Inst Technol, Dept Environm Technol & Urban Planning, Showa Ku, Nagoya, Aichi 4668555, Japan

来源：

关键词：

tetrahedral; amorphous carbon; camphor; diamond; pulsed laser deposition;

D O I：

10.1016/j.diamond.2004.06.035

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The properties of tetrahedral amorphous carbon (ta-C) films grown by pulsed laser deposition (PLD) using camphoric carbon (CC) target and their respective effects of diamond percentages by weight in the target (Dwt.%) are discussed. Scanning electron microscopy (SEM), atomic force microscopy (AFM), Visible-Raman spectroscopy, Fourier transform infrared spectroscopy (FTIR) and X-ray photoelectron spectroscopy (XPS) analyses indicated that the Dwt.% noticeably modified the sp(3) bonds content and the morphology of the ta-C films. The optical gap (E-g) and electrical resistivity (rho) increase with Dwt.% up to 1.6 eV and 5.63x10(7) (Omega cm), respectively, for the ta-C films deposited using target with higher of 50 Dwt.%. We found that the Dwt.% has modified the surface morphological, structural, bonding and physical properties of the camphoric carbon films. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：2174 / 2179

页数：6

共 36 条

[1] MICROSTRUCTURAL MODIFICATIONS IN DIAMOND-LIKE CARBON THIN-FILMS CAUSED BY HIGH-ENERGY ION IRRADIATION [J].