Effects of high dose nitrogen implantation into aluminum

The effects of high dose nitrogen implantation into aluminum on phase structure and mechanical properties were studied by using Rutherford backscattering (RBS), scanning electron. microscopy (SEM), atomic force microscopy (AFM), nanoindentation and friction/wear tests. The samples were-implanted using both, separated or unseparated nitrogen beams, at the temperatures ranging from 20degreesC up to 550degreesC, the highest fluencies used were equal to I x 10(19) at N/cm(2). The effects obtained indicate the formation of an AlN layer. At higher implantation fluencies the microtopography of the sample surface becomes granular. The latter effect is likely to be due to the incompatibility between Al and AlN crystalline structures. The samples implanted up to a fluence of I X 10(18) at N/cm(2) at RT revealed best mechanical properties; increased hardness and low friction coefficient. (C) 2003 Elsevier Science Ltd. All rights reserved.