Structural and optical properties of P-Ga codoping ZnO thin films deposited by magnetron sputtering

被引：15

作者：

Wang, Q. P. ^{[1
]}

Sun, Z. ^{[1
]}

Du, J. ^{[1
]}

Zhao, P. ^{[1
]}

Wu, X. H. ^{[1
]}

Zhang, X. J. ^{[1
]}

机构：

[1] Shandong Univ, Sch Phys & Microelect, Shandong 250100, Peoples R China

来源：

OPTICAL MATERIALS | 2007年 / 29卷 / 11期

基金：

中国国家自然科学基金;

关键词：

P-type ZnO film; magnetron sputtering; P-Ga codoping;

D O I：

10.1016/j.optmat.2006.05.010

中图分类号：

T [工业技术];

学科分类号：

08 [工学];

摘要：

The P-Ga codoping ZnO thin films have been prepared on sapphire substrates by magnetron sputtering. Structural, optical and electrical properties of ZnO film were investigated using X-ray diffraction meter, transmittance spectra and resistivity, respectively. The obtained films were polycrystalline with the hexagonal structure, and a preferred orientation (0002) with the c-axis perpendicular to the substrates. The ZnO thin films became P-type after annealing. We have observed a room resistivity of 0.37 Q cm and a carrier concentration of 1.6 x 10(18) cm(-3) in P-type ZnO film. (c) 2006 Published by Elsevier B.V.

引用

页码：1358 / 1361

页数：4

共 18 条

[1]

Optically pumped lasing of ZnO at room temperature [J].

Bagnall, DM ;

Chen, YF ;

Zhu, Z ;

Yao, T ;

Koyama, S ;

Shen, MY ;

Goto, T .

APPLIED PHYSICS LETTERS, 1997, 70 (17) :2230-2232

[2]

Stimulated emission and optical gain in ZnO epilayers grown by plasma-assisted molecular-beam epitaxy with buffers [J].

Chen, YF ;

Tuan, NT ;

Segawa, Y ;

Ko, H ;

Hong, S ;

Yao, T .

APPLIED PHYSICS LETTERS, 2001, 78 (11) :1469-1471

[3]

Ultraviolet super-radiation luminescence of sputtering ZnO film under cathode-ray excitation at room temperature [J].

Guo, CX ;

Fu, ZX ;

Shi, CS .

CHINESE PHYSICS LETTERS, 1999, 16 (02) :146-148

[4]

Transparent conducting ZnO thin films prepared by XeCl excimer laser ablation [J].

Hiramatsu, M ;

Imaeda, K ;

Horio, N ;

Nawata, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (02) :669-673

[5]

Violet and UV luminescence emitted from ZnO thin films grown on sapphire by pulsed laser deposition [J].

Jin, BJ ;

Im, S ;

Lee, SY .

THIN SOLID FILMS, 2000, 366 (1-2) :107-110

[6]

Fabrication of the low-resistive p-type ZnO by codoping method [J].

Joseph, M ;

Tabata, H ;

Saeki, H ;

Ueda, K ;

Kawai, T .

PHYSICA B-CONDENSED MATTER, 2001, 302 :140-148

[7]

P-type electrical conduction in transparent thin films of CuAlO2 [J].

Kawazoe, H ;

Yasukawa, M ;

Hyodo, H ;

Kurita, M ;

Yanagi, H ;

Hosono, H .

NATURE, 1997, 389 (6654) :939-942

[8]

The grain size effects on the photoluminescence of ZnO/α-Al2O3 grown by radio-frequency magnetron sputtering [J].

Kim, KK ;

Song, JH ;

Jung, HJ ;

Choi, WK ;

Park, SJ ;

Song, JH .

JOURNAL OF APPLIED PHYSICS, 2000, 87 (07) :3573-3575

[9]

Green luminescent center in undoped zinc oxide films deposited on silicon substrates [J].

Lin, BX ;

Fu, ZX ;

Jia, YB .

APPLIED PHYSICS LETTERS, 2001, 79 (07) :943-945

[10]

ABSORPTION-EDGE SHIFT IN ZNO THIN-FILMS AT HIGH CARRIER DENSITIES [J].

ROTH, AP ;

WEBB, JB ;

WILLIAMS, DF .

SOLID STATE COMMUNICATIONS, 1981, 39 (12) :1269-1271

← 1 2 →