Metamorphic InP/InGaAs double-heterojunction bipolar transistor structure grown on GaAs by solid source molecular beam epitaxy

被引:1
作者
Zheng, HQ [1 ]
Radhakrishnan, K [1 ]
Wang, H [1 ]
Yuan, KH [1 ]
Yoon, SF [1 ]
Ng, GI [1 ]
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Ctr Microelect, Singapore 639798, Singapore
来源
2000 INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS, CONFERENCE PROCEEDINGS | 2000年
关键词
D O I
10.1109/ICIPRM.2000.850225
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report, for the first time, metamorphic InP/InGaAs double-heterojunction bipolar transistor (DHBT) structures grown on GaAs substrates by solid source molecular beam epitaxy (SSMBE). A linearly graded InxGa1-xP (x: 0.48 to 1) buffer layer was used to accommodate the strain relaxation. Mesa-type devices were fabricated and characterized. The devices show promising DC and RF performances, indicating the great potential for SSMBE growth of metamorphic InP/InGaAs HBT structures for high speed and high frequency applications.
引用
收藏
页码:41 / 44
页数:4
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