Design and fabrication of diffractive optical elements

被引：64

作者：

Taghizadeh, MR ^{[1
]}

Blair, P ^{[1
]}

Layet, B ^{[1
]}

Barton, IM ^{[1
]}

Waddie, AJ ^{[1
]}

Ross, N ^{[1
]}

机构：

[1] Heriot Watt Univ, Dept Phys, Diffract Opt Grp, Edinburgh EH14 4AS, Midlothian, Scotland

来源：

MICROELECTRONIC ENGINEERING | 1997年 / 34卷 / 3-4期

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

10.1016/S0167-9317(97)00188-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An introduction to the design and fabrication of diffractive optical elements is presented. Design techniques for diffractive optic in the two theoretical design areas, the scalar and resonance domains, and the dominant methods of fabrications are described. Theoretical and experimental examples are given in each section.

引用

页码：219 / 242

页数：24

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