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[4]
Formation of a lead zirconate titanate (PZT)/Pt interfacial layer and structural changes in the Pt/Ti/SiO2/Si substrate during the deposition of PZT thin film by electron cyclotron resonance plasma-enhanced chemical vapor deposition
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JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1997, 36 (7A)
:4386-4391