共 15 条
[1]
PZT THIN-FILM PREPARATION ON PT-TI ELECTRODE BY RF-SPUTTERING
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1991, 30 (9B)
:2152-2154
[2]
Barin I.P.D., 1989, Thermochemical Data of Pure Substances
[3]
CHIKARMANE V, 1992, MATER RES SOC S P, V243, P367
[4]
EFFECT OF ZR/TI RATIO ON CRYSTAL-STRUCTURE OF THIN LEAD-ZIRCONATE-TITANATE FILMS PREPARED BY REACTIVE SPUTTERING
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1993, 32 (9B)
:4048-4051
[5]
FUKUDA T, 1989, JPN J APPL PHYS, V28, P1085
[6]
Composition control of lead zirconate titanate thin films in electron cyclotron resonance plasma enhanced chemical vapor deposition system
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1996, 35 (5A)
:2726-2730
[7]
Investigation of Pt/Ti bottom electrodes for Pb(Zr,Ti)O-3 films
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1997, 36 (1A)
:294-300
[8]
KIM ST, 1995, MATER CHEM PHYS, V45, P155
[9]
Kugiyama K., 1991, MATER RES SOC S P, V243, P179