EFFECT OF ZR/TI RATIO ON CRYSTAL-STRUCTURE OF THIN LEAD-ZIRCONATE-TITANATE FILMS PREPARED BY REACTIVE SPUTTERING

被引：15

作者：

FUJISAWA, A ^{[1
]}

FURIHATA, M ^{[1
]}

MINEMURA, I ^{[1
]}

ONUMA, Y ^{[1
]}

FUKAMI, T ^{[1
]}

机构：

[1] SHINSHU UNIV,FAC ENGN,DEPT ELECT & ELECTR ENGN,NAGANO 380,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 9B期

关键词：

PZT THIN FILMS; REACTIVE SPUTTERING; PEROVSKITE; ZRO2; MPB; SELF-LIMITING PROCESS;

D O I：

10.1143/JJAP.32.4048

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Thin lead zirconate-titanate (PZT) films have been synthesized on MgO(100) using the tripole magnetron sputtering system. This system makes it possible to sputter lead and zirconium-titanium alternately. Lead concentration in the deposited films can be easily adjusted to near stoichiometry through the control of substrate temperature. The c-axis-oriented films with perovskite structure of Morphotropic Phase Boundary composition were obtained at 550-degrees-C via the self-limiting process of lead concentration. The formation process of thin PZT films has been investigated with reference to the observed results of the dependence of the crystal structure on Zr/Ti ratio as well as lead concentration in the films.

引用

页码：4048 / 4051

页数：4

共 14 条

[1] OBSERVATIONS ON THE OPERATION OF A PLANAR MAGNETRON SPUTTERING SYSTEM BY TARGET EROSION PATTERNS
FUKAMI, T
SHINTANI, F
NAOE, M
[J]. THIN SOLID FILMS, 1987, 151 (03) : 373 - 381
[2] Fukami T., 1983, Japanese Journal of Applied Physics, Supplement, V22, P18
[3] FUKAMI T, 1983, 4TH P M FERR MET THE
[4] FUKAMI T, 1991, JPN J APPL PHYS, V30, P2125
[5] PREPARATION OF PBTIO3 THIN-FILMS BY REACTIVE IONIZED CLUSTER BEAM DEPOSITION
HAYAMIZU, S
YAHASHI, A
SHIBATA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (9B): : 2975 - 2977
[6] HIRATA K, 1992, JPN J APPL PHYS, V31, P3012
[7] REACTION SEQUENCE IN THE FORMATION OF LEAD ZIRCONATE-LEAD TITANATE SOLID-SOLUTION - ROLE OF RAW-MATERIALS
HIREMATH, BV
KINGON, AI
BIGGERS, JV
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1983, 66 (11) : 790 - 793
[8] IKEDA T, 1964, JPN J APPL PHYS, V3, P581
[9] Ikeda T., 1962, JPN J APPL PHYS, V1, P218, DOI [10.1143/JJAP.1.218, DOI 10.1143/JJAP.1.218]
[10] MULTI-ION-BEAM REACTIVE SPUTTER DEPOSITION OF FERROELECTRIC PB(ZR,TI)O3 THIN-FILMS
KRUPANIDHI, SB
HU, H
KUMAR, V
[J]. JOURNAL OF APPLIED PHYSICS, 1992, 71 (01) : 376 - 388

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