Optical study of silicon-containing amorphous hydrogenated carbon

被引：49

作者：

Zhang, X ^{[1
]}

Weber, WH ^{[1
]}

Vassell, WC ^{[1
]}

Potter, TJ ^{[1
]}

Tamor, MA ^{[1
]}

机构：

[1] Ford Motor Co, Res Lab, Dearborn, MI 48121 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1998年 / 83卷 / 05期

关键词：

D O I：

10.1063/1.367042

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Silicon-containing amorphous hydrogenated carbon films deposited by a plasma-enhanced chemical vapor deposition process were studied using both Raman and ellipsometry spectroscopies. Analyses of the experimental data from both these techniques yielded valuable information about the microstructure of the films. The silicon incorporation in amorphous hydrogenated carbon breaks down large size sp(2) carbon clusters and enhances sp(3) bonding. The reduction of large sp(2) graphitic defects, the enhancement of sp(3) bonding, and the associated microstructure changes are responsible for the desired properties of silicon-containing amorphous hydrogenated carbon. (C) 1998 American Institute of Physics.

引用

页码：2820 / 2825

页数：6

共 25 条

[1]

ANGUS JC, 1986, PLASMA DEPOSITED THI

[2] SUBSTITUTIONAL NITROGEN DOPING OF TETRAHEDRAL AMORPHOUS-CARBON [J].

DAVIS, CA ;

MCKENZIE, DR ;

YIN, Y ;

KRAVTCHINSKAIA, E ;

AMARATUNGA, GAJ ;

VERASAMY, VS .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1994, 69 (06) :1133-1140

[3] Improvement of mechanical properties of a-C:H by silicon addition [J].

DeMartino, C ;

Fusco, G ;

Mina, G ;

Tagliaferro, A ;

Vanzetti, L ;

Calliari, L ;

Anderle, M .

[4] INVESTIGATION OF HYDROCARBON-PLASMA-GENERATED CARBON-FILMS BY ELECTRON-ENERGY-LOSS SPECTROSCOPY [J].

FINK, J ;

MULLERHEINZERLING, T ;

PFLUGER, J ;

SCHEERER, B ;

DISCHLER, B ;

KOIDL, P ;

BUBENZER, A ;

SAH, RE .

PHYSICAL REVIEW B, 1984, 30 (08) :4713-4718

[5]

FOROUHI AR, 1991, HDB OPTICAL CONSTANT, V2, P837

[6] Amorphous hydrogenated carbon films for tribological applications .1. Development of moisture insensitive films having reduced compressive stress [J].

Gangopadhyay, AK ;

Willermet, PA ;

Tamor, MA ;

Vassell, WC .

TRIBOLOGY INTERNATIONAL, 1997, 30 (01) :9-18

[7]

GEIS MW, 1993, ENCY APPL PHYS, V5

[8] Raman diagnostics of amorphous diamond-like carbon films produced with a mass-separated ion beam [J].

Khriachtchev, LY ;

Lappalainen, R ;

Hakovirta, M ;

Rasanen, M .

[9] STRUCTURAL INVESTIGATION OF XENON-ION-BEAM-IRRADIATED GLASSY-CARBON [J].

MCCULLOCH, DG ;

PRAWER, S ;

HOFFMAN, A .

PHYSICAL REVIEW B, 1994, 50 (09) :5905-5917

[10] MODIFIED FOROUHI AND BLOOMER DISPERSION MODEL FOR THE OPTICAL-CONSTANTS OF AMORPHOUS HYDROGENATED CARBON THIN-FILMS [J].

MCGAHAN, WA ;

MAKOVICKA, T ;

HALE, J ;

WOOLLAM, JA .

THIN SOLID FILMS, 1994, 253 (1-2) :57-61

← 1 2 3 →