The spatial resolution of imaging using core-loss spectroscopy in the scanning transmission electron microscope

被引:46
作者
Cosgriff, EC
Oxley, MP
Allen, LJ [1 ]
Pennycook, SJ
机构
[1] Univ Melbourne, Sch Phys, Melbourne, Vic 3010, Australia
[2] Oak Ridge Natl Lab, Div Condensed Matter Sci, Oak Ridge, TN 37831 USA
基金
澳大利亚研究理事会;
关键词
delocalization of inelastic scattering; core-loss spectroscopy; scanning transmission electron microscopy;
D O I
10.1016/j.ultramic.2004.11.001
中图分类号
TH742 [显微镜];
学科分类号
摘要
The 'delocalization' of inelastic scattering is an important issue for the ultimate spatial resolution of core-loss spectroscopy in the electron microscope. This paper investigates the resolution of scanning transmission electron microscopy images for single, isolated atoms. Images are simulated from first principles using a nonlocal model for electron core-loss spectroscopy. The role of the width of the probe relative to the delocalization of the underlying ionization interaction is considered. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:317 / 326
页数:10
相关论文
共 26 条
[1]   Atomic-resolution electron energy loss spectroscopy imaging in aberration corrected scanning transmission electron microscopy [J].
Allen, LJ ;
Findlay, SD ;
Lupini, AR ;
Oxley, MP ;
Pennycook, SJ .
PHYSICAL REVIEW LETTERS, 2003, 91 (10)
[2]   Lattice-resolution contrast from a focused coherent electron probe. Part I [J].
Allen, LJ ;
Findlay, SD ;
Oxley, MP ;
Rossouw, CJ .
ULTRAMICROSCOPY, 2003, 96 (01) :47-63
[3]   INELASTIC-SCATTERING OF FAST ELECTRONS BY CRYSTALS [J].
ALLEN, LJ ;
JOSEFSSON, TW .
PHYSICAL REVIEW B, 1995, 52 (05) :3184-3198
[4]   Validity of generalized scattering equations and corresponding inelastic-cross-section expressions for comprehensive electron diffraction conditions [J].
Allen, LJ ;
Josefsson, TW .
PHYSICAL REVIEW B, 1996, 53 (17) :11285-11287
[5]   Sub-angstrom resolution using aberration corrected electron optics [J].
Batson, PE ;
Dellby, N ;
Krivanek, OL .
NATURE, 2002, 418 (6898) :617-620
[6]  
BRANSDEN BH, 1999, PHYS ATOMS MOL
[7]  
Cowan R D., 1981, The theory of atomic structure and spectra
[8]   Progress in aberration-corrected scanning transmission electron microscopy [J].
Dellby, N ;
Krivanek, OL ;
Nellist, PD ;
Batson, PE ;
Lupini, AR .
JOURNAL OF ELECTRON MICROSCOPY, 2001, 50 (03) :177-185
[9]   Scattering of Å-scale electron probes in silicon [J].
Dwyer, C ;
Etheridge, J .
ULTRAMICROSCOPY, 2003, 96 (3-4) :343-360
[10]  
Herman F., 1963, ATOMIC STRUCTURE CAL