A monolithic surface micromachined Z-axis gyroscope with digital output

被引：56

作者：

Jiang, XS ^{[1
]}

Seeger, JI ^{[1
]}

Kraft, M ^{[1
]}

Boser, BE ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

来源：

2000 SYMPOSIUM ON VLSI CIRCUITS, DIGEST OF TECHNICAL PAPERS | 2000年

关键词：

D O I：

10.1109/VLSIC.2000.852839

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

A monolithic surface micromachined Z-axis vibratory rate gyroscope with an on-chip A/D converter is fabricated in a monolithic MEMS/circuits technology with 2 mu m CMOS and 2.25 mu m-thick mechanical polysilicon. The on-chip position sense circuit uses correlated double sampling to reject 1/f and kT/C noise and resolves 0.02Angstrom displacements. The gyroscope achieves a noise floor of 3 degrees/sec/root Hz at atmospheric pressure and operates from a single 5V supply.

引用

页码：16 / 19

页数：4

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