Assembly of optical fibres for the connection of polymer-based waveguide

被引：2

作者：

Ansel, Y ^{[1
]}

Grau, D ^{[1
]}

Holzki, M ^{[1
]}

Kraus, S ^{[1
]}

Neumann, F ^{[1
]}

Reinhard, C ^{[1
]}

Schmitz, F ^{[1
]}

机构：

[1] Inst Mikrotech Mainz GmbH, D-55129 Mainz, Germany

来源：

LASER DIODES, OPTOELECTRONIC DEVICES, AND HETEROGENOUS INTEGRATION | 2003年 / 4947卷

关键词：

assembly; optical microsystems; micro positioning; polymer-based waveguide; heterogenous integration;

D O I：

10.1117/12.468619

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes the realisation of polymer-based optical structures and the assembly and packaging strategy to connect optical fibre ribbons to the waveguides. For that a low cost fabrication process using the SU-8(TM) thick photo-resist is presented. This process consists in the deposition of two photo-structurized resist layers filled up with epoxy glue realising the core waveguide. For the assembly, a new modular vacuum gripper was realised and installed on an automatic pick & place assembly robot to mount precisely and efficiently the optical fibres in the optical structures. First results have shown acceptable optical propagation loss for the complete test structure.

引用

页码：102 / 112

页数：11

共 12 条

[1]

HARPER CA, ELECT PACKAGING INTE

[2] Polymeric optical MEMS [J].

Hossfeld, J ;

Paatzsch, T ;

Schulze, J ;

Neumeier, M ;

Weber, L ;

Bauer, HD ;

Ehrfeld, W .

DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2, 1999, 3680 :637-645

[3]

*IEC, 1996, 17545 IEC

[4]

IMAMURA S, 1998, 98TH8369 IEEE LEOS, P35

[5]

LABIANCA N, 1995, P SOC PHOTO-OPT INS, V2438, P846, DOI 10.1117/12.210413

[6]

NEUMEIER M, ENTWICKLUNG MINIAT 9, P10

[7]

NIENHAUS M, 1998, P SPIE, V3511

[8]

REINHART G, 2001, PRODUCTION ENG, V8, P123

[9]

SCHELLER T, THESIS, P19

[10] Electro-optical printed circuit board (EOPCB) [J].

Schmieder, K ;

Wolter, KJ .

50TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE - 2000 PROCEEDINGS, 2000, :749-753

← 1 2 →