Vertical adiabatic transition between a silica planar waveguide and an electro-optic polymer fabricated with gray-scale lithography

被引：14

作者：

Chang, DH ^{[1
]}

Azfar, T

Kim, SK

Fetterman, HR

Zhang, C

Steier, WH

机构：

[1] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA

[2] Univ So Calif, Dept Chem & Elect Engn, Los Angeles, CA 90089 USA

来源：

OPTICS LETTERS | 2003年 / 28卷 / 11期

关键词：

D O I：

10.1364/OL.28.000869

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report on a vertical adiabatic transition between silica planar waveguides and electro-optic (EO) polymer. Gray-scale lithography was used to pattern a polymer transition with an exponential profile. Excess losses of the order of 1 dB were measured, and good mode matching to simulation was observed. This configuration, which married the advantages of both silica and EO-polymer planar-optic technologies, demonstrates a new technique for fabricating hybrid active devices with high modulation speed, low insertion loss, and complex geometries. (C) 2003 Optical Society of America.

引用

页码：869 / 871

页数：3

共 9 条

[1] Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass [J].

Daschner, W ;

Long, P ;

Stein, R ;

Wu, C ;

Lee, SH .

APPLIED OPTICS, 1997, 36 (20) :4675-4680

[2] Three-dimensional integrated optics using polymers [J].

Garner, SM ;

Lee, SS ;

Chuyanov, V ;

Chen, AT ;

Yacoubian, A ;

Steier, WH ;

Dalton, LR .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1999, 35 (08) :1146-1155

[3] Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam-sensitive glass [J].

Gimkiewicz, C ;

Hagedorn, D ;

Jahns, J ;

Kley, EB ;

Thoma, F .

APPLIED OPTICS, 1999, 38 (14) :2986-2990

[4] Hybrid polymer/silica vertical coupler switch with <-32dB polarisation-independent crosstalk [J].

Keil, N ;

Yao, HH ;

Zawadzki, C ;

Lösch, K ;

Satzke, K ;

Wischmann, W ;

Wirth, JV ;

Schneider, J ;

Bauer, J ;

Bauer, M .

ELECTRONICS LETTERS, 2001, 37 (02) :89-90

[5] Silica-based planar lightwave circuits: Passive and thermally active devices [J].

Miya, T .

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2000, 6 (01) :38-45

[6] Recent advances in electrooptic polymer modulators incorporating highly nonlinear chromophore [J].

Oh, MC ;

Zhang, H ;

Zhang, C ;

Erlig, H ;

Chang, Y ;

Tsap, B ;

Chang, D ;

Szep, A ;

Steier, WH ;

Fetterman, HR ;

Dalton, LR .

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2001, 7 (05) :826-835

[7]

PAESLER MA, 1996, NEAR FIELDS OPTICS T

[8] Theory of electromagnetic field imaging and spectroscopy in scanning near-field optical microscopy [J].

Porto, JA ;

Carminati, R ;

Greffet, JJ .

JOURNAL OF APPLIED PHYSICS, 2000, 88 (08) :4845-4850

[9] INTEGRATED OPTIC ADIABATIC DEVICES ON SILICON [J].

SHANI, YS ;

HENRY, CH ;

KISTLER, RC ;

KAZARINOV, RF ;

ORLOWSKY, KJ .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1991, 27 (03) :556-566

← 1 →