Rapid fabrication of microcomponents

被引:6
作者
Hanemann, T [1 ]
Hausselt, J [1 ]
Ruprecht, R [1 ]
Skrifvars, M [1 ]
Zum Gahr, KH [1 ]
Pfleging, W [1 ]
机构
[1] Forschungszentrum Karlsruhe, Inst Mat Forsch, D-76021 Karlsruhe, Germany
来源
DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS, PROCEEDINGS | 2000年 / 4019卷
关键词
rapid fabrication technologies; micromolding; laser micromachining; mold insert; microcaving;
D O I
10.1117/12.382295
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In the macroscopic world different "rapid "-technologies like Rapid Prototyping, Rapid Manufacturing or Rapid Tooling have been established for a fast prototype or molding tool development. In all cases CAD-data can be transformed in a model or prototype directly using a laser which polymerizes reactive resins layer by layer to a final 3D mold within a short period. In this work the rapid fabrication of microcomponents made from polymers or composites will be presented. The whole fabrication process is divided into two main steps: Firstly laser assisted micromachining using Nd:YAG and KrF-Excimer laser allows a rapid manufacturing of microstructured cemented carbide or steel mold inserts. Secondly the application of light induced reaction injection molding using reactive monomer/polymer resins gives access to the replication of the previously fabricated mold insert. The total processing period starting from CAD until the molded microstructured part is less than one week.
引用
收藏
页码:436 / 443
页数:8
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