Nanochemistry at the atomic scale revealed in hydrogen-induced semiconductor surface metallization

被引:120
作者
Derycke, V
Soukiassian, PG
Amy, F
Chabal, YJ
D'Angelo, MD
Enriquez, HB
Silly, MG
机构
[1] Univ Paris Sud Orsay, Commissariat Energie Atom, Lab Surfaces & Interfaces Mat Avancee Associe, DSM,DRECAM,SPCSI, F-91191 Gif Sur Yvette, France
[2] Agere Syst, Mat Res, Murray Hill, NJ 07974 USA
关键词
D O I
10.1038/nmat835
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Passivation of semiconductor surfaces against chemical attack can be achieved by terminating the surface-dangling bonds with a monovalent atom such as hydrogen. Such passivation invariably leads to the removal of all surface states in the bandgap, and thus to the termination of nonmetallic surfaces. Here we report the first observation of semiconductor surface metallization induced by atomic hydrogen. This result, established by using photo-electron and photo-absorption spectroscopies and scanning tunnelling techniques, is achieved on a Si-terminated cubic silicon carbide (SiC) surface. It results from competition between hydrogen termination of surface-dangling bonds and hydrogen-generated steric hindrance below the surface. Understanding the ingredient for hydrogen-stabilized metallization directly impacts the ability to eliminate electronic defects at semiconductor interfaces critical for microelectronics, provides a means to develop electrical contacts on high-bandgap chemically passive materials, particularly for interfacing with biological systems, and gives control of surfaces for lubrication, for example of nanomechanical devices.
引用
收藏
页码:253 / 258
页数:6
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