Subwavelength-scale tailoring of surface phonon polaritons by focused ion-beam implantation

被引：140

作者：

Ocelic, N ^{[1
]}

Hillenbrand, R ^{[1
]}

机构：

[1] Max Planck Inst Biochem, Nano Photon Grp, D-82152 Martinsried, Germany

来源：

NATURE MATERIALS | 2004年 / 3卷 / 09期

关键词：

D O I：

10.1038/nmat1194

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The subwavelength-scale tailoring of surface phonon polaritons, by focused ion-beam implantation is discussed. The single step-fabricated, monolithic structures can be used for controlling electromagnetic energy transport by surface phonon polaritons in miniaturized integrated devices. The polaritonic properties of ion-beam patterned silica surface are verified by near-field microscopy. The near-field images shows that nanometre-scale resolved infrared mapping of crystal quality is useful in the processing of semiconductors or crystal growth.

引用

页码：606 / 609

页数：4

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