Chemical and spectroscopic aspects of polymer ablation: Special features and novel directions

被引：272

作者：

Lippert, T ^{[1
]}

Dickinson, JT

机构：

[1] Paul Scherrer Inst, CH-5232 Villigen, Switzerland

[2] Washington State Univ, Pullman, WA 99164 USA

来源：

CHEMICAL REVIEWS | 2003年 / 103卷 / 02期

关键词：

D O I：

10.1021/cr010460q

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The complexity of interactions between polymers and laser photons were studied. A high quality through-holes were obtained when the laser was tuned to a strongly absorbing wavelength. The results showed that the etch rate increased gradually with increasing repetition rate at a fluence of 0.59 Jcm-2.

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页码：453 / 485

页数：33

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